Sensor systems and methods are disclosed herein, including a sensor chip,
upon which at least two surface acoustic wave (SAW) sensing elements are
centrally located on a first side (e.g., front side) of the sensor chip.
The SAW sensing elements occupy a common area on the first side of the
sensor chip. An etched diaphragm is located centrally on the second side
(i.e., back side) of the sensor chip opposite the first side in
association with the two SAW sensing elements in order to concentrate the
mechanical strain of the sensor system or sensor device in the etched
diagram, thereby providing high strength, high sensitivity and ease of
manufacturing thereof.