A resist exposure system and a method of forming a pattern on a resist are
provided and include an exposure source, a photoresist composition, and a
mask positioned therebetween. The resist composition comprises a first
photoresist X and a second photoresist Y. The first photoresist X absorbs
at a higher wavelength than the second photoresist Y. The second
photoresist Y has a lower glass transitional temperature than the first
photoresist X.