A MOSFET includes an insulated gate electrode on a surface of a
semiconductor substrate having an impurity region of first conductivity
type therein that extends to the surface. Source and drain regions of
second conductivity type are provided in the impurity region. The source
region includes a highly doped source contract region that extends to the
surface and a lightly doped source extension. The lightly doped source
extension extends laterally underneath a first end of the insulated gate
electrode and defines a source-side P-N junction with the well region.
The drain region includes a highly doped drain contact region that
extends to the surface and a lightly doped drain extension. The lightly
doped drain extension extends laterally underneath a second end of the
insulated gate electrode and defines a drain-side P-N junction with the
well region. This well region, which extends within the impurity region
and defines a non-rectifying junction therewith, is more highly doped
than the impurity region. The well region extends opposite the insulated
gate electrode and has a sufficient width that dopants therein partially
compensate innermost portions of the lightly doped source and drain
extensions that extend underneath the insulated gate electrode. However,
the well region is not so wide as to provide compensation to remaining
portions of the lightly doped source and drain extensions or the source
and drain contact regions.