A device reader having a multiplex illuminator, the illuminator, and
methods for reading deflection of a large number of microcantilevers are
provided. The illuminator includes a micro-optical subassembly for
illuminating cantilevers (illuminator) that uses a plurality of VCSELs
for generating an array of electromagnetic beams, and focuses the beams
on the cantilevers. Deflection of the cantilevers causes a change in
angle of the beams reflected from the cantilevers, which is recorded by a
plurality of position sensitive devices.