Disclosed is an ordered microelectronic fabrication sequence in which
color filters are formed by conformal deposition directly onto a
photodetector array of a CCD, CID, or CMOS imaging device to create a
concave-up pixel surface, and, overlayed with a high transmittance
planarizing film of specified index of refraction and physical properties
which optimize light collection to the photodiode without additional
conventional microlenses. The optically flat top surface serves to
encapsulate and protect the imager from chemical and thermal cleaning
treatment damage, minimizes topographical underlayer variations which
would aberrate or cause reflection losses of images formed on non-planar
surfaces, and, obviates residual particle inclusions induced during
dicing and packaging. A CCD imager is formed by photolithographically
patterning a planar-array of photodiodes on a semiconductor substrate.
The photodiode array is provided with metal photoshields, passivated,
and, color filters are formed thereon. A transparent encapsulant is
deposited to planarize the color filter layer and completes the
solid-state color image-forming device without conventional convex
microlenses.