A chemical mechanical polishing pad. The pad contains a water-insoluble
matrix and Water-soluble particles dispersed in the water-insoluble
matrix material and has a polishing surface and a non-polishing surface
on a side opposite to the polishing surface. The pad has a light
transmitting area which optically communicates from the polishing surface
to the non-polishing surface. The non-polishing surface of the light
transmitting area has a surface roughness (Ra) of 10 pm or less.