The present invention relates to a novel photoresist composition sensitive
to radiation in the deep ultraviolet and a process for imaging the
composition. The photoresist composition comprises a) a novel polymer
that is insoluble in an aqueous alkaline solution and comprises at least
one acid labile group, and b) a compound capable of producing an acid
upon irradiation. The novel polymer of the present invention comprises at
least one unit with a bisester group, (--C(O)OWC(O)O--), attached on one
side to a polymer backbone unit (A) comprising an aliphatic group, and
attached on the other side to an adamantyl group. The invention also
relates to the novel polymer and a novel monomer for obtaining the novel
polymer.