A system for a monitoring lithography lasers at integrated circuit
fabrication plants. Each laser at each fabrication plant has associated
with it a terminal server. With respect to each fabrication plant a
central control server unit is in communication with each of the lasers
through a local area network. Information from the lasers is collected by
the central control server unit and the information is used to provide
summary information which is made available in a web site format to
interested parties having access authorization.