It is an object of the present invention to provide a material for an
antireflective film that has high etching selectivity with respect to the
resist, that is, that has a faster etching speed than the resist, a
pattern formation method for forming an antireflective film layer on a
substrate using this antireflective film material, and a pattern
formation method using this antireflective film as a hard mask for
substrate processing.The present invention provides an antireflective
film material comprising a polymer (A) comprising copolymerized repeating
units expressed by the Formula (1) and/or the Formula (2), an organic
solvent (B), an acid generator (C) and an optional crosslinking agent (D)
##STR00001##