A chemical amplification type positive resist composition, which can
reduce cost steeply without significantly decreasing basic abilities, is
provided, and the chemical amplification type positive resist composition
includes (A) a resin having a polymerization unit derived from
p-hydroxystyrene and a polymerization unit of the formula (1) or formula
(2) ##STR00001## which is insoluble or poorly soluble itself in an
alkali aqueous solution but becomes soluble in an alkali aqueous solution
by the action of an acid, (B) a resin obtained by protecting a portion of
the hydroxyl groups in poly(p-hydroxystyrene) with a protective group not
dissociating by the action of an acid or a resin obtained by substituting
a portion of the hydroxyl groups in poly(p-hydroxystyrene) with hydrogen,
and (C) an acid generating agent.