A multilayer barrier film structure of an organic EL display panel has a
multilayered body formed on a surface of a supporting substrate. The
multilayered body includes an intermediate film sandwiched between
inorganic films. The film structure includes a sealing region provided so
as to surround the multilayered body on the surface of the supporting
substrate. In a method of manufacturing an organic EL display panel
comprising an organic EL device and a supporting substrate, a first
inorganic film is formed so as to cover a surface of a supporting
substrate, an intermediate film is formed on the first inorganic film, a
second inorganic film is formed on the intermediate film, an organic EL
device is formed on the second inorganic film, and a perimeter outside
the organic EL device is subjected to heating or irradiation, to form a
sealing region.