A method and system for determining specific pixel modulation states of a
spatial light modulator (SLM) to print a desired pattern on a substrate
are disclosed. The method includes selecting at least one super-pixel in
an object plane of the desired pattern, the super-pixel being formed of
at least two pixels. At least one edge of the desired pattern crosses a
boundary within the super-pixel, the at least one edge being defined by
specific slope and position parameters relative to the super-pixel. The
method also includes (i) forming an interpolation table to tabulate
pre-calculated pixel modulation states and (ii) determining the specific
pixel modulation states for each of the pixels in accordance with the
interpolation table. Disclosed also are a method and system for providing
a spatial light modulator (SLM). The SLM includes a plurality of mirrors
structured to form groups of super-pixels. Each super-pixel (i) includes
two or more mirrors from the plurality of mirrors and (ii) is configured
to switch only one pixel of light. Each of the two or more mirrors can be
separately actuated.