An apparatus includes a static gas bearing provided upon a first object
and configured to form a gas layer between the first object and a second
object by use of gas supplied thereto, and to support the first object
movably relative to the second object, a plurality of exhaust grooves
provided upon the first object and configured to surround the static gas
bearing, and a plurality of exhaust flowpassages provided through the
first object, connecting to a respective one of the plurality of exhaust
grooves, and configured to exhaust gas from a respective one of the
plurality of exhaust grooves. An outermost exhaust flowpassage of the
plurality of exhaust flowpassages connected to an outermost exhaust
groove, which is outermost of one of the plurality of exhaust grooves
with respect to the static gas bearing, is shorter than an innermost
exhaust flowpassage of the plurality of exhaust flowpassages connected to
an innermost exhaust groove, which is innermost one of the plurality of
exhaust grooves with respect to the static gas bearing, so that a
conductance of the outermost exhaust flowpassage is greater than that of
the innermost exhaust flowpassage.