To provide an abrasive slurry having high dispersion stability, including:
abrasive fine particles made of one or more kinds of oxides; colloidal
fine particles made of colloidal oxide with an average particle size
smaller than an average particle size of the abrasive fine particles; and
a dispersion medium in which the abrasive fine particles and the
colloidal fine particles are dispersed, and a manufacturing method for a
substrate as an inorganic substrate, including polishing the substrate
using the abrasive slurry. An abrasive slurry according to the present
invention keeps high dispersion stability for a long time and shows a
satisfactory redispersion property, which can eliminate a problem about
precipitation/aggregation as much as possible and can be used as a
dispersant-free abrasive containing absolutely no organic dispersant. In
particular, by using the abrasive slurry, it is possible to manufacture a
substrate such as a silicon substrate used in a semiconductor
manufacturing process or an aluminum substrate used in an electrostatic
chuck manufacturing process through CMP with industrial advantage.