A mono-gate memory device and fabricating method thereof are provided,
which may reduce or solve over-erasing problems by implementing a mono
split-gate SONOS type non-volatile memory cell, and which do not affect
logic circuit characteristics by enabling logic circuit fabrication after
completing the ONO structure. The present memory cell includes an ONO
layer on the active area of the substrate, a gate oxide layer on the
active area adjacent to the ONO layer, a gate on the gate oxide layer and
on a portion of the ONO layer, a drain partially covered by the ONO
layer, and a source partially covered by the gate oxide layer.