According to some embodiments, a capacitor includes a storage conductive
pattern, a storage electrode having a complementary member enclosing a
storage conductive pattern so as to complement an etch loss of the
storage electrode, a dielectric layer disposed on the storage electrode,
and a plate electrode disposed on the dielectric layer. Because the
complementary member compensates for the etch loss of the storage
electrode during several etching processes, the deterioration of the
structural stability of the storage electrode may be prevented.
Additionally, because the complementary member is formed on an upper
portion of the storage electrode, the storage electrode may have a
sufficient thickness to enhance the electrical characteristics of the
capacitor that includes the storage electrode.