A lithographic apparatus includes a liquid confinement system to confine
liquid in a space between a final element of a projection system and a
substrate, and a first and a second substrate stage that are configured
to mutually cooperate in order to perform a joint movement for bringing
the lithographic apparatus from a first configuration, in which the
liquid is confined between a first substrate held by the first substrate
stage and the final element, towards a second configuration, in which the
liquid is confined between a second substrate held by the second
substrate stage and the final element, such that during the joint
movement the liquid is essentially confined within the space with respect
to the final element. The apparatus also includes a position measurement
system configured to at least during the joint movement measure the
position of the first and second substrate stages.