To fabricate an integrated semiconductor product with integrated
metal-insulator-metal capacitor, first of all a dielectric auxiliary
layer (6) is deposited on a first electrode (2, 3, 5). This auxiliary
layer (6) is then opened up (15) via the first electrode. Then, a
dielectric layer (7) is produced, and the metal track stack (8, 9, 10)
for the second electrode is then applied to the dielectric layer (6).
This is followed by the patterning of the metal-insulator-metal capacitor
using known etching processes. This makes it possible to produce
dielectric capacitor layers of any desired thickness using materials
which can be selected as desired. In particular, this has the advantage
that via etches can be carried out significantly more easily than in the
prior art, since it is not necessary to etch through the residual
dielectric capacitor layer above the metal tracks.