A borderless contact structure and method of fabricating the structure,
the method including: (a) providing a substrate; (b) forming a
polysilicon line on the substrate, the polysilicon line having sidewalls;
(c) forming an insulating sidewall layer on the sidewalls of the
polysilicon line; (d) removing a portion of the polysilicon line and a
corresponding portion of the insulating sidewall layer in a contact
region of the polysilicon line; and (e) forming a silicide layer on the
sidewall of the polysilicon line in the contact region. Also an SRAM cell
using the borderless contact structure and a method of fabricating the
SRAM cell.