In one aspect, the invention encompasses a semiconductor processing
method. A layer of material is formed over a semiconductive wafer
substrate. Some portions of the layer are exposed to energy while other
portions are not exposed. The exposure to energy alters physical
properties of the exposed portions relative to the unexposed portions.
After the portions are exposed, the exposed and unexposed portions of the
layer are subjected to common conditions. The common conditions are
effective to remove the material and comprise a rate of removal that is
influenced by the altered physical properties of the layer. The common
conditions remove either the exposed or unexposed portions faster than
the other of the exposed and unexposed portions. After the selective
removal of the exposed or unexposed portions, and while the other of the
exposed and unexposed portions remains over the substrate, the wafer is
cut into separated die. In another aspect, the invention encompasses
another semiconductor processing method. A layer of
(CH.sub.3).sub.ySi(OH).sub.4-y is formed over a substrate. Some portions
of the layer are exposed to ultraviolet light while other portions are
not exposed. The exposure to ultraviolet light converts the exposed
portions to (CH.sub.3).sub.xSiO.sub.2-x. After the exposure to
ultraviolet light, the exposed and unexposed portions of the layer are
subjected to hydrofluoric acid to selectively remove the
(CH.sub.3).sub.ySi(OH).sub.4-y of the unexposed portions relative to the
(CH.sub.3).sub.xSiO.sub.2-x of the exposed portions.