Provided is a microelectromechanical system (MEMS) actuator in which a
cantilever piezoelectric actuator and a comb actuator are combined to
perform dual shaft drive. The MEMS includes: a stationary comb fixed on a
substrate; a movable comb disposed separately from the substrate; and a
spring connected to the movable comb and the substrate to resiliently
support the movable comb, wherein the movable comb includes a
piezoelectric material layer in a laminated manner to be perpendicularly
moved by a piezoelectric phenomenon and laterally moved by an
electrostatic force to the stationary comb, whereby the MEMS actuator can
be used in a driving apparatus of an ultra-slim optical disk drive since
the movable comb is made of a piezoelectric material to simultaneously
perform focusing actuation to a Z-axis as well as planar actuation.