An electrode layer for thin-film magnetic heads includes a Ta base sub-layer, an Au sub-layer functioning as a main conductive sub-layer, and a protective sub-layer, those sub-layers being disposed in that order. An Au electrode seed sub-layer containing any one of NiFeCr, NiCr, and NiFe is placed between the Ta base sub-layer and the Au sub-layer. The Au electrode seed sub-layer has a thickness of 40 to 100 .ANG..

 
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> Piezoelectric and electrostatic microelectromechanical system actuator

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