In order to reliably transfer an object whose temperature has been controlled to an appropriate temperature in a state in which the appropriate temperature is maintained, there are provided a slider arm 143 that holds and carries a wafer W, a drive device LM having a movable element to which the slider arm 143 is fixed and that integrally moves with the slider, and a heat sink 147 that is inserted between the movable element and the slider arm 143 and controls the temperature of the slider arm 143 to a predetermined temperature.