The present invention provides, in one embodiment, a semiconductor wafer
(100) dicing process. The dicing process comprises removing circuit
features (120) from a street (115) located between dies (105) on a
semiconductor substrate (102) using a first blade (135), such that the
semiconductor substrate is exposed, and cutting through the exposed
semiconductor substrate using a second blade (190). The first blade has a
surface (140) coated with an abrasive material (145) comprising grit
particles (150), having a median diameter (155) of at least about 25
microns. The grit particles are adhered to the first blade with a bonding
agent (160) having a hardness of about 80 or less (Rockwell B Hardness
scale). The grit particles have a concentration in the bonding agent
ranging from about 25 to about 50 vol %. Another embodiment of the
invention is a method of manufacturing a semiconductor device (200).