A system having a deposition chamber comprising a xenon excimer lamp and an inlet for deposition of a lubricant into the deposition chamber, wherein the deposition chamber has an ability to perform both a vapor deposition of the lubricant and an in-situ UV exposure of the lubricant is disclosed. Also, a method including depositing a lubricant on a magnetic recording medium in a deposition chamber and in-situ UV exposing of the lubricant to irradiation from a xenon excimer lamp is disclosed.