An inductor-based integrated MEMS microphone and a method of making the
microphone is provided. The microphone structure includes a vibrating
inductor that is suspended over another stationary inductor such that the
magnetic field induced from one inductor induces an electrical potential
across the other. The stationary inductor is embedded in a dielectric
material that is etched out over the stationary inductor to provide the
cavity over which the vibrating inductor is suspended.