The present invention relates to a photoresist composition suitable for
image-wise exposure and development as a negative photoresist comprising
a negative photoresist composition and an inorganic particle material
having an average particle size equal or greater than 10 nanometers,
wherein the thickness of the photoresist coating film is greater than 5
microns. The negative photoresist composition is selected from (1) a
composition comprising (i) a resin binder, (ii) a photoacid generator,
and (iii) a cross-linking agent; or (2) a composition comprising (i) a
resin binder, (ii) optionally, addition-polymerizeable, ethylenically
unsaturated compound(s) and (iii) a photoinitiator; or (3) a composition
comprising (i) a photopolymerizable compound containing at least two
pendant unsaturated groups; (ii) ethylenically unsaturated
photopolymerizable polyalkylene oxide hydrophilic compound(s); and (iii)
a photoinitiator.