A system and method for selectively increasing the thermal effect of a
radiant energy source to the surface of an object relative to the
substrate is described in the context of rapid thermal processing of
semiconductor wafers, and apparatus produced therefrom. A
radiation-absorptive atmosphere is introduced between the radiant energy
source and the object to increase conductive heat transfer to the surface
of the object and reduce the available radiant heat transfer to the
substrate, thereby increasing the thermal effect to the surface relative
to the substrate.