The present invention provides a method for manufacturing a display device
having a TFT that can be operated at high speed while using a small
number of photomasks and improving the utilization efficiency of
materials, where the threshold value is difficult to be varied. In the
invention, a catalytic element is applied to an amorphous semiconductor
film and the amorphous semiconductor film is heated to form a crystalline
semiconductor film. After removing the catalytic element from the
crystalline semiconductor film, a top-gate type thin film transistor with
a planar structure is manufactured. Moreover, by using the droplet
discharging method where an element of a display device is formed
selectively, the process can be simplified, and loss of materials can be
reduced.