A dispensing device has a cantilever comprising a plurality of thin films
arranged relative to one another to define a microchannel in the
cantilever and to define at least portions of a dispensing microtip
proximate an end of the cantilever and communicated to the microchannel
to receive material therefrom. The microchannel is communicated to a
reservoir that supplies material to the microchannel. One or more
reservoir-fed cantilevers may be formed on a semiconductor chip
substrate. A sealing layer preferably is disposed on one of the first and
second thin films and overlies outermost edges of the first and second
thin films to seal the outermost edges against material leakage. Each
cantilever includes an actuator, such as for example a piezoelectric
actuator, to impart bending motion thereto. The microtip includes a
pointed pyramidal or conical shaped microtip body and an annular shell
spaced about the pointed microtip body to define a material-dispensing
annulus thereabout. The working microtip may be used to dispense material
onto a substrate, to probe a surface in scanning probe microscopy, to
apply an electrical stimulus or record an electrical response on a
surface in the presence of a local environment created around the tip by
the material dispensed from the tip or to achieve other functions.