A heating assembly (36) for heating a cathode (38) of an electron gun (30)
of an exposure apparatus (10) includes a radiation source (42) and a beam
shaper (44). The radiation source (42) generates a source beam (46). The
beam shaper (44) receives the source beam (46) and selectively shapes the
source beam (46) into a shaped beam (48) that is directed to the cathode
(38). In certain embodiments, the beam shaper (44) can readily change the
shape and intensity profile of the shaped beam (48) to achieve a desired
electron beam (32) from the electron gun (30). In one embodiment, the
radiation source (42) generates a pulsed source beam (46).