The present invention relates to an oxide thin film for a bolometer-type
uncooled infrared detector having high sensitivity. An amorphous vanadium
tungsten oxide (V--W--O.sub.x), i.e. a tungsten-doped vanadium oxide, is
provided as an oxide film for a bolometer application. An oxide for
bolometer having characteristics of low resistance of 5 to 200 k .OMEGA.
and variable TCR between -1.5 and -4.1%/.degree. C. can be obtained by an
oxidation of vanadium-tungsten metal film at a low temperature around
300.degree. C., with changing a tungsten content and oxidation time. And
a reproducible thin film can be fabricated by low price equipment for
thin film deposition, without expensive ion beam or laser apparatus.
Accordingly, an oxide for bolometer having characteristics of resistance
lower than 100 k.OMEGA. and TCR higher than -3%/.degree. C. can be
obtained with reproducibility, whereby an uncooled-type infrared detector
having high sensitivity can be fabricated.