A method of component management in a substrate processing system is
disclosed. The substrate processing system has a set of components, at
least a plurality of components of the set of components being designated
to be smart components, each component of the plurality of components
having an intelligent component enhancement (ICE). The method includes
querying the plurality of components to request their respective unique
identification data from their respective ICEs. The method further
includes receiving unique identification data from the plurality of
components if any of the plurality of components responds to the
querying. The method additionally includes flagging the first component
for corrective action if a first component of the plurality of components
fails to provide first component unique identification data when the
first component identification data is expected.