A system and method for enhancing the image resolution in a lithographic
system, is presented herein. The invention comprises decomposing a
reticle pattern into at least two constituent sub-patterns that are
capable of being optically resolved by the lithographic system, coating a
substrate with a pre-specified photoresist layer, and exposing a first of
the at least two constituent sub-patterns by directing a projection beam
through the first sub-pattern such that the lithographic system produces
a first sub-pattern image onto the pre-specified photoresist layer of the
substrate. The invention further comprises processing the exposed
substrate, exposing a second of the at least two constituent sub-patterns
by directing the projection beam through the second sub-pattern such that
the lithographic system produces a second sub-pattern image onto the
pre-specified photoresist layer of the substrate, and then combining the
first and second sub-pattern images to produce a desired pattern on the
substrate.