LED epitaxial layers (n-type, p-type, and active layers) are grown on a
substrate. For each die, the n and p layers are electrically bonded to a
package substrate that extends beyond the boundaries of the LED die such
that the LED layers are between the package substrate and the growth
substrate. The package substrate provides electrical contacts and
conductors leading to solderable package connections. The growth
substrate is then removed. Because the delicate LED layers were bonded to
the package substrate while attached to the growth substrate, no
intermediate support substrate for the LED layers is needed. The
relatively thick LED epitaxial layer that was adjacent the removed growth
substrate is then thinned and its top surface processed to incorporate
light extraction features. There is very little absorption of light by
the thinned epitaxial layer, there is high thermal conductivity to the
package because the LED layers are directly bonded to the package
substrate without any support substrate therebetween, and there is little
electrical resistance between the package and the LED layers so
efficiency (light output vs. power input) is high. The light extraction
features of the LED layer further improves efficiency.