A patient care apparatus comprises a portable patient support module having a first mattress, a first platform carrying the first mattress, and a first canopy positioned on the first platform to enclose an infant positioned on the first mattress in a first isolation chamber. The portable patient support module is configured to be carried by hand when the infant is positioned on the first mattress. The patient care apparatus further comprises a second patient support module having a second mattress, a second platform carrying the second mattress, and a second canopy positioned on the second platform. The second platform and the second canopy cooperate to enclose the portable patient support module positioned on the second mattress in a second isolation chamber.

 
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> Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof

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