The generation of a graphical three-dimensional (3D) view of a system model of a Micro Electro-Mechanical System (MEMS), which also may be depicted in a schematic view, is disclosed. Information contained in the system model is used to generate 3D representations of model components which are then assembled into an overall model. The system model is composed by selecting MEMS component models from a MEMS component library. The MEMS component models include parameter information and include or reference 3D view generators used to generate the 3D view of the associated component. The system model is programmatically analyzed to identify the associated 3D view generators used to generate the 3D views of the components. The visualization process may be extended to include a simulator which simulates the underlying system model. The simulation results are then displayed by using the 3D visualization process to present 3D views of the model as it changes during different points in the simulation.