A method of conveying the designer's intended electrical characteristics
for a semiconductor design is provided by forming tolerance bands for a
design layer of interest that take into consideration constraints from
design layers that interact with and influence the features on the design
layer of interest. The method determines regions, i.e. tolerance bands,
within which the printed edges of features of the layer of interest will
print within a predetermined criterion, and satisfy a variety of
constraints, including, but not limited to, electrical, overlay and
manufacturability constraints arising from the influence of features on
other layers. The method may be implemented in a computer program product
for execution on a computer system. The resulting tolerance bands can be
used to efficiently convey the designer's intent to a lithographer, an
OPC engineer or a mask manufacturer or tool.