Vessel and method for the production and delivery of a
precursor-containing fluid stream comprising the gaseous phase of a
precursor material are disclosed herein. In one aspect, there is provided
an vessel comprising: an interior volume wherein the interior volume is
segmented into an upper volume and a lower volume wherein the upper
volume and the lower volume are in fluid communication; a lid comprising
a fluid inlet, a fluid outlet, an optional fill port, and an internal
recess wherein at least a portion of the upper volume resides within the
internal recess; a sidewall interposed between the lid and a base; and at
least one protrusion that extends into the lower volume wherein the
precursor is in contact with the at least one protrusion and wherein at
least one protrusion extends from at least one selected from the lid, the
sidewall, the base, and combinations thereof.