The present invention relates to magnetic micro-electromechanical systems
(MEMS) or magnetic MEMS devices, particularly electronic devices in which
a member adjoins a base or substrate and extends from the substrate
proximate to a magnetic field element having an altered output associated
with movement of the member. The first magnetic field element is adapted
to emit or detect a magnetic field and positioned proximate to the
member, and the second magnetic field element adapted to emit or detect a
magnetic field and positioned proximate to the base or substrate, such
that movement of the member in a first direction by a non-magnetic force
results in a variation of magnetic field strength associated with
displacement of the sensor in a first direction. The invention also
relates to methods for fabricating magnetic MEMS devices, transducers,
sensors, and accelerometers.