A method for determining kernels in a sum of coherent systems (SOCS)
approximation is provided. Information for an object to be simulated in a
manufacturing process is determined. For example, information based on
geometries that are included in a layout or mask is determined. A set of
kernels from a transmission cross coefficient (TCC) matrix are also
determined. The set of kernels may be weighted by importance values in an
order of importance. The kernels may then be re-ordered based on the
information for the object. These kernels are then re-ordered in the SOCS
series to reflect their order of importance. The SOCS series of kernels
is then truncated at the number of kernels desired. Accordingly, by
re-ordering the kernels that may be more relevant to the object to
include higher weights, when the truncation occurs, the kernels that are
most relevant may be included in the SOCS approximation.