A floating body germanium (Ge) phototransistor and associated fabrication
process are presented. The method includes: providing a silicon (Si)
substrate; selectively forming an insulator layer overlying the Si
substrate; forming an epitaxial Ge layer overlying the insulator layer
using a liquid phase epitaxy (LPE) process; forming a channel region in
the Ge layer; forming a gate dielectric, gate electrode, and gate spacers
overlying the channel region; and, forming source/drain regions in the Ge
layer. The LPE process involves encapsulating the Ge with materials
having a melting temperature greater than a first temperature, and
melting the Ge using a temperature lower than the first temperature. The
LPE process includes: forming a dielectric layer overlying deposited Ge;
melting the Ge; and, in response to cooling the Ge, laterally propagating
an epitaxial growth front into the Ge from an underlying Si substrate
surface.