To provide a highly reliable complementary thin film transistor circuit in
which deviations in characteristics of a first-conductivity-type thin
film transistor and a second-conductivity-type thin film transistor can
be reduced or prevented and operated stably. A first-conductivity-type
thin film transistor and a second-conductivity-type thin film transistor
are formed using single crystal grains, the single crystal grains being
formed substantially centered on each of a plurality of starting-point
portions provided on an insulating surface of a substrate, wherein the
first-conductivity-type thin film transistor and the
second-conductivity-type thin film transistor are formed by equalizing
their drain current directions, and are formed in the single crystal
grains in which at least channel regions of the first-conductivity-type
thin film transistor and the second-conductivity-type thin film
transistor have the same plane orientation.