An accelerometer (305) for measuring seismic data. The accelerometer (305)
includes an integrated vent hole for use during a vacuum sealing process
and a balanced metal pattern for reducing cap wafer bowing. The
accelerometer (305) also includes a top cap press frame recess (405) and
a bottom cap press frame recess (420) for isolating bonding pressures to
specified regions of the accelerometer (305). The accelerometer (305) is
vacuum-sealed and includes a balanced metal pattern (730) to prevent
degradation of the performance of the accelerometer (305). A dicing
process is performed on the accelerometer (305) to isolate the electrical
leads of the accelerometer (305). The accelerometer (305) further
includes overshock protection bumpers (720) and patterned metal
electrodes to reduce stiction during the operation of the accelerometer
(305).