The invention relates to a sensor with at least one silicon-based
micromechanical structure, which is integrated with a sensor chamber of a
foundation wafer, and with at least one covering that covers the
foundation wafer in the region of the sensor chamber, and to a method for
producing a sensor. It is provided that in the sensor of the invention,
the covering (13) comprises a first layer (32) (deposition layer) that is
permeable to an etching medium and the reaction products, and a
hermetically sealing second layer (34) (sealing layer) located above it,
and that in the method of the invention, at least the sensor chamber (28)
present in the foundation wafer (11) after the establishment of the
structure (26) is filled with an oxide (30), in particular CVD oxide or
porous oxide; the sensor chamber (28) is covered by a first layer (32)
(deposition layer), in particular of polysilicon, that is transparent to
an etching medium and the reaction products or is retroactively made
transparent; the oxide (30) in the sensor chamber (28) is removed through
the deposition layer (32) with the etching medium; and next, a second
layer (34) (sealing layer), in particular of metal or an insulator, is
applied to the deposition layer (32) and hermetically seals off the
sensor chamber (28).