Provided are a p-type electrode and a III-V group GaN-based compound
semiconductor device using the same. The electrode includes a first layer
disposed on a III-V group nitride compound semiconductor layer and formed
of a Zn-based material containing a solute; and a second layer stacked on
the first layer and formed of at least one selected from the group
consisting of Au, Co, Pd, Pt, Ru, Rh, Ir, Ta, Cr, Mn, Mo, Tc, W, Re, Fe,
Sc, Ti, Sn, Ge, Sb, Al, ITO, and ZnO. The Zn-based p-type electrode has
excellent electrical, optical, and thermal properties.