A method of selectively plating nickel on an intermediate semiconductor
device structure. The method comprises providing an intermediate
semiconductor device structure having at least one aluminum or copper
structure and at least one tungsten structure. One of the aluminum or
copper structure and the tungsten structure is nickel plated while the
other remains unplated. The aluminum or copper structure or the tungsten
structure may first be activated toward nickel plating. The activated
aluminum or copper structure or the activated tungsten structure may then
be nickel plated by immersing the intermediate semiconductor device
structure in an electroless nickel plating solution. The unplated
aluminum or copper structure or the unplated tungsten structure may
subsequently be nickel plated by activating the unplated structure and
nickel plating the activated structure. A method of simultaneously
plating the aluminum or copper structure and the tungsten structure with
nickel is also disclosed, as is an intermediate semiconductor device
structure.