A device for aligning a plurality of vertically arranged (upright) disks
(20), especially wafer disks during the fabrication of semiconductor
chips. Two mounting or bearing elements (30, 32) respectively have
individually mounted guide rollers (34) positioned next to each other for
each disk position. A drive device (40, 42; 50, 60; 240, 242) is for
rotating the disks in relation to their azimuthal positions. A device
(80) is provided for detecting the azimuthal positions of notches or
indentations (22) arranged in the outer circumference in the disks (20).
A device is provided for controlling the drive with the signals of the
detection device (80) for detecting the azimuthal positions of the
notches (22). The drive for rotating the disks in relation to their
azimuthal positions has an individually driven drive roller element (42)
for each disk (20) mounted on the stationary axis. In one embodiment, the
drive roller elements, via a plurality of transmission rollers, can be
selectively coupled to a driven roller (60) with the aid of the actuator
elements. In a second embodiment, the first drive roller is individually
driven by a plurality of individually controlled drive elements (240).