An objective having an apical lens and a lens frame which supports the apical lens, includes an elastic member which supports the lens frame by exerting a bias force in a central axial direction of the apical lens, and an apex of the lens frame has a convex portion which projects outward in the central axial direction more than an apical surface of the apical lens.

 
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> Devices and methods for sensing secure attachment of an object onto a chuck

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