The present invention is generally directed to various methods and systems
for dynamically controlling metrology work in progress. In one
illustrative embodiment, the method comprises providing a metrology
control unit that is adapted to control metrology work flow to at least
one metrology tool, identifying a plurality of wafer lots that are in a
metrology queue wherein the wafer lots are intended to be processed in at
least one metrology tool, and wherein the metrology control unit selects
at least one of the wafer lots for metrology processing in the at least
one metrology tool and selects at least one other of the plurality of
wafer lots to be removed from the metrology queue based upon the
metrology processing of the selected at least one wafer lot in the at
least one metrology tool.